{"version":"1.0","type":"rich","provider_name":"Buzzsprout","provider_url":"https://www.buzzsprout.com","author_url":"https://www.buzzsprout.com/1607350","width":500,"thumbnail_width":600,"thumbnail_height":600,"title":" Extreme Ultraviolet (EUV) lithography: Going beyond 2nm","author_name":"Advantest Talks Semi","html":"<iframe src=\"https://www.buzzsprout.com/1607350/episodes/11838129-extreme-ultraviolet-euv-lithography-going-beyond-2nm?client_source=oembed&amp;iframe=true\" width=\"100%\" height=\"200\" frameborder=\"0\" scrolling=\"no\" loading=\"lazy\" title=\"Advantest Talks Semi,  Extreme Ultraviolet (EUV) lithography: Going beyond 2nm\"></iframe>","height":200,"thumbnail_url":"https://www.buzzsprout.com/rails/active_storage/representations/redirect/eyJfcmFpbHMiOnsiZGF0YSI6ODc1NjQ0NjQsInB1ciI6ImJsb2JfaWQifX0=--a6df4f324adaebffcb3bd69ac9034e942b1d0dfe/eyJfcmFpbHMiOnsiZGF0YSI6eyJmb3JtYXQiOiJqcGciLCJyZXNpemVfdG9fZmlsbCI6WzYwMCw2MDAseyJjcm9wIjoiY2VudHJlIn1dLCJzYXZlciI6eyJxdWFsaXR5Ijo2MH0sImNvbG91cnNwYWNlIjoic3JnYiJ9LCJwdXIiOiJ2YXJpYXRpb24ifX0=--0b154cb6b88107719b1a277923d35676ba5519cc/S2%20E4%20Extreme%20Ultraviolet%20Lithography.jpg"}